JPH0520884Y2 - - Google Patents

Info

Publication number
JPH0520884Y2
JPH0520884Y2 JP1985190619U JP19061985U JPH0520884Y2 JP H0520884 Y2 JPH0520884 Y2 JP H0520884Y2 JP 1985190619 U JP1985190619 U JP 1985190619U JP 19061985 U JP19061985 U JP 19061985U JP H0520884 Y2 JPH0520884 Y2 JP H0520884Y2
Authority
JP
Japan
Prior art keywords
piston
chamber
passage
hole
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985190619U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6297303U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985190619U priority Critical patent/JPH0520884Y2/ja
Publication of JPS6297303U publication Critical patent/JPS6297303U/ja
Application granted granted Critical
Publication of JPH0520884Y2 publication Critical patent/JPH0520884Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
  • Fluid-Pressure Circuits (AREA)
JP1985190619U 1985-12-10 1985-12-10 Expired - Lifetime JPH0520884Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985190619U JPH0520884Y2 (en]) 1985-12-10 1985-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985190619U JPH0520884Y2 (en]) 1985-12-10 1985-12-10

Publications (2)

Publication Number Publication Date
JPS6297303U JPS6297303U (en]) 1987-06-20
JPH0520884Y2 true JPH0520884Y2 (en]) 1993-05-28

Family

ID=31144008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985190619U Expired - Lifetime JPH0520884Y2 (en]) 1985-12-10 1985-12-10

Country Status (1)

Country Link
JP (1) JPH0520884Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6598521B2 (ja) * 2015-06-08 2019-10-30 ニッコー・マテリアルズ株式会社 真空積層方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51119491U (en]) * 1975-03-25 1976-09-28

Also Published As

Publication number Publication date
JPS6297303U (en]) 1987-06-20

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